Tài liệu An Introduction to Microelectromechanical Systems Engineering P2 ppt

• Journal of Micromechanics and Microengineering (JMM): a peer￾reviewed scientific journal published by the Institute of Physics of Bristol,

United Kingdom.

• Sensors Magazine: a trade journal with emphasis on practical and commercial

applications. It is published by Helmers Publishing, Inc., of Peterborough,

New Hampshire.

• MST News: a newsletter on microsystems and MEMS. It is published by

VDI/VDE Technologiezentrum Informationstechnik GmbH of Teltow, Ger￾many, and is available on-line.

• Micro/Nano Newsletter: a publication companion to “R&D Magazine”

with news and updates on micromachined devices and nanoscale-level

technologies. It is published by Reed Business Information of Morris Plains,

New Jersey.

• Small Times Magazine: a trade journal reporting on MEMS, MST, and nano￾technology. It is published by Small Times Media, LLC, a subsidiary company

of Ardesta, LLC, of Ann Arbor, Michigan.

List of Conferences and Meetings

Several conferences cover advances in MEMS or incorporate program sessions on

micromachined sensors and actuators. The following list gives a few examples:

• International Conference on Solid-State Sensors and Actuators (Transducers):

held in odd years and rotates sequentially between North America, Asia, and

Europe.

• Solid-State Sensor and Actuator Workshop (Hilton-Head): held in even years

in Hilton Head Island, South Carolina, and sponsored by the Transducers

Research Foundation of Cleveland, Ohio.

10 MEMS: A Technology from Lilliput

Table 1.4 List of a Few Government and Nongovernment Organizations with Useful On-line Resources

Organization Address Description Web Site

MEMSnet Reston, VA U.S. information

clearinghouse

www.memsnet.org

MEMS Exchange Reston, VA Intermediary broker for

foundry services

www.mems-exchange.org

MEMS Industry Group Pittsburgh, PA Industrial consortium www.memsindustrygroup.org

NIST Gaithersburg, MD Sponsored U.S.

government projects

www.atp.nist.gov

DARPA Arlington, VA Sponsored U.S.

government projects

www.darpa.mil

IDA Alexandria, VA Insertion in military

applications

mems.ida.org

NEXUS Grenoble, France European MST network www.nexus-mems.com

VDI/VDE – IT Teltow, Germany Association of German

Engineers

www.mstonline.de

AIST – MITI Tokyo, Japan The “Micromachine Project”

in Japan

www.aist.go.jp

ATIP Albuquerque, NM Asian Technology

Information Project

www.atip.org

• Micro Electro Mechanical Systems Workshop (MEMS): an international

meeting held annually and sponsored by the IEEE.

• International Society for Optical Engineering (SPIE): regular conferences

held in the United States and sponsored by SPIE of Bellingham, Washington.

• Micro Total Analysis Systems (µTAS): a conference focusing on microanalyti￾cal and chemical systems. It is an annual meeting and alternates between

North America and Europe.

Summary

Microelectromechanical structures and systems are miniature devices that enable the

operation of complex systems. They exist today in many environments, espe￾cially automotive, medical, consumer, industrial, and aerospace. Their potential for

future penetration into a broad range of applications is real, supported by strong

development activities at many companies and institutions. The technology consists

of a large portfolio of design and fabrication processes (a toolbox), many borrowed

from the integrated circuit industry. The development of MEMS is inherently inter￾disciplinary, necessitating an understanding of the toolbox as well as of the end

application.

References

[1] Dr. Albert Pisano, in presentation material distributed by the U.S. DARPA, available at

http://www.darpa.mil.

[2] System Planning Corporation, “Microelectromechanical Systems (MEMS): An SPC Market

Study,” January 1999, 1429 North Quincy Street, Arlington, VA 22207.

[3] Frost and Sullivan, “World Sensors Market: Strategic Analysis,” Report 5509-32, February

1999, 2525 Charleston Road, Mountain View, CA 94043, http://www.frost.com.

[4] Frost and Sullivan, “U.S. Microelectromechanical Systems (MEMS),” Report 5549-16,

June 1997, 2525 Charleston Road, Mountain View, CA 94043, http://www.frost.com.

[5] Intechno Consulting, “Sensors Market 2008,” Steinenbachgaesslein 49, CH-4051, Basel,

Switzerland, http://www.intechnoconsulting.com.

[6] In-Stat/MDR, “Got MEMS? Industry Overview and Forecast,” Report IN030601EA,

August 2003, 6909 East Greenway Parkway, Suite 250, Scottsdale, AZ 85254,

http://www.instat.com.

[7] WTC Wicht Technologie Consulting, “The RF MEMS Market 2002–2007,” Frauenplatz

5, D-80331 München, Germany, http://www.wtc-consult.de.

[8] Yole Développement, “World MEMS Fab,” 45 Rue Sainte Geneviève, 69006 Lyon, France,

http://www.yole.fr.

[9] Public Citizen, Inc., et al. v. Norman Mineta, Secretary of Transportation, Docket No.

02-4237, August 6, 2003, United States Court of Appeals, Second Circuit, New York,

http://www.ca2.uscourts.gov.

[10] “IC Makers Gear Up for New Tire Pressure Monitor Rule,” Electronic Engineering Times,

December 1, 2003, p. 1.

[11] Roylance, L. M., and J. B. Angell, “A Batch Fabricated Silicon Accelerometer,” IEEE

Trans. Electron Devices, Vol. 26, No. 12, 1979, pp. 1911–1917.

[12] Mercer Management Consulting, Inc., “New Technologies Take Time,” Business Week,

April 19, 1999, p. 8.

Summary 11