Tài liệu Handbook of Micro and Nano Tribology P7 pptx

Bhushan, B. “Microscratching/Microwear, Nanofabrication/Nanomachining...”

Handbook of Micro/Nanotribology.

Ed. Bharat Bhushan

Boca Raton: CRC Press LLC, 1999

© 1999 by CRC Press LLC

© 1999 by CRC Press LLC

7

Microscratching/

Microwear,

Nanofabrication/

Nanomachining, and

Nano/Picoindentation

Using Atomic

Force Microscopy

Bharat Bhushan

7.1 Introduction

7.2 Experimental Techniques

AFM for Microscratching/Microwear and

Nanoindentation • Nano/Picoindenter

7.3 Microscratching/Microwear Studies

7.4 Nanofabrication/Nanomachining Studies

7.5 Nano/Picoindentation

7.6 Closure

References

7.1 Introduction

Wear of sliding surfaces can occur by one or more wear mechanisms, including adhesive, abrasive, fatigue,

impact, corrosive, and fretting. The wear rate, a measure of wear, generally needs to be minimized

(Bhushan, 1996). As the dimensions of components and loads used continue to decrease (such as in

microelectromechanical systems or MEMS), scratching/wear and mechanical properties at the micro- to

nanoscales become very important. With the advent of the newly developed scanning probe microscopes

(SPMs), particularly the atomic force microscope (AFM), it is possible to study the interfacial phenomena

at a small scale and light load. The AFM/FFM tip simulates a sharp single asperity traveling over a surface.

Scratching and wear processes at different normal loads are studied in AFMs by using a sharp diamond

tip. This tip can also be used for nanofabrication/nanomachining. AFMs, in conjunction with special

sensors, are used for measurement of mechanical properties on nano- to picoscales.