Mô tơ quay 2 chiều dẫn động bằng các bộ kích hoạt nhiệt dạng chữ v

CE & TECHNOLOGY 4 No. 88 - 2012

A NOVEL BI-DIRECTIONAL MICRO ROTATIONAL MOTOR DRIVEN

BV V-SHAPED ELECTROTHERMAL ACTUATORS

MO TO QUAY HAI CHi^U DAN DON G BAN G CA C B O KICH HOAT NHl$T DANG CHO" V

Dang Bao Lam, Dinh Khac Toan, Nguyen Tuan Khoa, Pham Hong Phuc, Vu Ngoc Hung

Hanoi University of Science and Technology

Received November 17, 2011; accepted January 17, 2012

ABSTRACT

tn this paper the authors report a novel design of a bi-directional micnj rotational motor (MRM)

driven by four V-shaped electrothermal actuators. Rotation of an outer rotor ring is achieved by

conversion of reciprocating movement of the V-shaped actuators, which are arranged In the couple so

that they are capable of generating a driving moment while working. By using two couples of the

driving actuators and the other two braking actuators, the motor can rotate bi-directionally, Theoretical

calculation of displacements and forces shows that the motor can produce a relatively large

displacement with low driving voltage. Simulation in Ansys has also been carried out, and the

simulated results matched well with the calculated ones. Acquired results point out that the pmposed

model is ready hr the next steps - fabrication and test of the micm rotational motor.

T6M TAT

Trong bai bdo ndy cdc tdc gii di xuit phuxyng dn thiit ki micro md ta quay hai chiiu duac din

dqng bdng bdn bg kich ho^t nhigt ddng chu- V. Bing cdch bd tri thich hgp theo timg cdp, cAc bd kich

hoat khi lam viec tao ra cdc c$p ngdu lgc de din ddng vdnh rd to ben ngodi Nh& ca cau phanh hSm,

thgc chit Id hai bg kich ho^t nhidt khdc. mo ta duxrc thiet ki cd kha ndng ddi chiiu quay. Cac bai todn

ciiuyen vi va luc cho thiy micro md ta co thi t^o ra chuyen vi tuong ddi l&n v&i di$n dp din thip. Kit

qua thu dugc khi mo phdng bdng Ansys hoan todn phu hgp v&l cdc kit qua tinh todn. Cdc kit qua thu

duac cho thay micm mo ta duac thiet kd co thi ho^t dgng tdt, du diiu kidn de tiip tue che tao, do dac

va thO nghiem.

I. INTRODUCTION nonlinear relation between the driving i

„, , -J . , r iL:tr-»*(- and displacement. The thermal actuators using With rapid development of MEMS v-shaped beams [5H7] help to overcome those market, besides already booming section or ,,

,.„-.', . . •' * , . problems.

MEMS devices of sensors, actuators are being

more and more studied and applied into human For generating rotational movemenL Kim

life. The most common ways of actuation are et al. used inchworm motion [8], in which the

electrostatic, electrothermal, piezoelectric and rotor is wrapped by Iwo opposing belts which

magnetoslatic. Among them, electrostatic and are connected to piezoelectric actuators. In the

magnetostatic ones need a large applied voltage inchworm motor designed by Sammoura [9],

in order to achieve a large force and four gap-closing actuators are used to rotate a

displacement. On the other hand, electrothermal rotor. Garcia and Sniegowski [10],[11] arranged

actuators can produce large force and electrostatic comb actuators so that linear

displacement with low voltage [1]. motion from actuators can be transmitted to J rotor through linkage mechanisms. Most of

those motors have their actuators placed outside

of the rotor, thus this configuration can cause

difficulties with transmission rotary movement

Until now, there is a number of articles

reporting research results on electrothermal

actuators. In [2]-[4], thermal actuators with hot

arm - cold arms have been used to produce a "",.'7"!l""*u "™"/T

,. , , ., , . ,- , out from the motors,

displacement while applying a driving voltage.

The advantage of this kind of thermal actuator The rotational motor proposed by the

is ability to gain relatively large force and authors [12], in which four electrostatic comb

displacement, but there are also some actuators and ratchet mechanisms are used to

disadvantages as low structure rigidity and rotate an outer ring, is designed to overcome