Micro-cutting : Fundamentals and applications

Micro-Cu

tting

Editors

KAI CHENG | Brunel University, UK

DEHONG HOU | Newcastle University, UK

Micro-Cutting: Fundamentals and Applications comprehensively covers state of the art research and

engineering practice in micro/nano cutting: an area which is becoming increasingly important, especially

in modern micro-manufacturing, ultraprecision manufacturing and high value manufacturing.

This book provides basic theory, design and analysis of micro-toolings and machines, modelling

methods and techniques, and integrated approaches for micro-cutting. The fundamental characteristics,

modelling, simulation and optimization of micro/nano cutting processes are emphasized with particular

reference to the predictabilty, producibility, repeatability and productivity of manufacturing at micro and

nano scales.

The fundamentals of micro/nano cutting are applied to a variety of machining processes including

diamond turning, micromilling, micro/nano grinding/polishing, ultraprecision machining, and the design

and implementation of micro/nano cutting process chains and micromachining systems.

Key features:

w Contains contributions from leading global experts

w Covers the fundamental theory of micro-cutting

w Presents applications in a variety of machining processes

w Includes examples of how to implement and apply micro-cutting for precision and

micro-manufacturing

Micro-Cutting: Fundamentals and Applications is an ideal reference for manufacturing engineers,

production supervisors, tooling engineers, planning and application engineers, as well as machine tool

designers. It is also a suitable textbook for postgraduate students in the areas of micro-manufacturing,

micro-engineering and advanced manufacturing methods.

Micro-Cutting

Fundamentals and Applications

Editors

CHENG

HOU

The Wiley Microsystem and Nanotechnology Series | Ronald Pethig & Horacio Espinosa | Series Editors

Micro-Cutting

Fundamentals

and Applications

Editors

KAI CHENG

DEHONG HUO

RED BOX RULES ARE FOR PROOF STAGE ONLY. DELETE BEFORE FINAL PRINTING. 23MM PPC FINAL ARTWORK

MICRO-CUTTING

Microsystem and Nanotechnology Series

Series Editors – Ron Pethig and Horacio Dante Espinosa

Micro-Cutting: Fundamentals and Applications

Cheng, Huo, August 2013

Nanoimprint Technology: Nanotransfer for Thermoplastic and Photocurable Polymer

Taniguchi, Ito, Mizuno and Saito, August 2013

Nano and Cell Mechanics: Fundamentals and Frontiers

Espinosa and Bao, January 2013

Digital Holography for MEMS and Microsystem Metrology

Asundi, July 2011

Multiscale Analysis of Deformation and Failure of Materials

Fan, December 2010

Fluid Properties at Nano/Meso Scale

Dyson et al., September 2008

Introduction to Microsystem Technology

Gerlach, March 2008

AC Electrokinetics: Colloids and Nanoparticles

Morgan and Green, January 2003

Microfluidic Technology and Applications

Koch et al., November 2000

MICRO-CUTTING

FUNDAMENTALS AND APPLICATIONS

Editors

Kai Cheng

Brunel University, UK

Dehong Huo

Newcastle University, UK

This edition first published 2013

© 2013 John Wiley & Sons, Ltd

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John Wiley & Sons, Ltd, The Atrium, Southern Gate, Chichester, West Sussex, PO19 8SQ, United Kingdom.

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All rights reserved. No part of this publication may be reproduced, stored in a retrieval system, or transmitted, in any form

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Library of Congress Cataloging-in-Publication Data

Micro cutting : fundamentals and applications / edited by Kai Cheng, Dehong Huo.

pages cm

Includes bibliographical references and index.

ISBN 978-0-470-97287-8 (cloth)

1. Micromachining. I. Cheng, K. (Kai), editor of compilation. II. Huo, Dehong, editor of compilation.

III. Title: Microcutting.

TJ1191.5.M4983 2013

671.3′5–dc23

2013015108

A catalogue record for this book is available from the British Library.

ISBN: 978-0-470-97287-8

Set in 10/12pt Times by SPi Publisher Services, Pondicherry, India

1 2013

List of Contributors xi

Series Preface xiii

Preface xv

Part One Fundamentals 1

1 Overview of Micro Cutting 3

Dehong Huo and Kai Cheng

1.1 Background and Scope 3

1.1.1 Micro Manufacturing 3

1.1.2 History and Development Process of Micro Cutting 5

1.1.3 Definition and Scope of Micro Cutting 7

1.1.4 Micro Cutting and Nanometric Cutting 8

1.2 Materials in Micro Cutting 10

1.3 Micro Cutting Processes 11

1.3.1 Micro Turning 12

1.3.2 Micro Milling 12

1.3.3 Micro Drilling 13

1.3.4 Micro Grinding 14

1.4 Micro Cutting Framework 14

References 16

2 Micro Cutting Mechanics 19

Dehong Huo and Kai Cheng

2.1 Introduction 19

2.2 Characterization of Micro Cutting 20

2.2.1 Micro Cutting and Ultra-Precision Machining 21

2.2.2 Enabling Technologies for Micro Cutting 22

Contents

vi Contents

2.3 Micro Cutting Mechanics 25

2.3.1 Size Effects 26

2.3.2 Chip Formation and Minimum Chip Thickness 27

2.3.3 Specific Cutting Energy and Micro Cutting Force

Modelling 29

2.3.4 Surface Generation and Burr Formation 33

2.4 Micro Machinability Issues and the Scientific Approaches 39

2.4.1 Vibration Assisted Micro Cutting 40

2.4.2 Laser Assisted Micro Cutting 40

2.5 Summary 41

References 42

3 Micro Tooling Design and Manufacturing 45

Paul T. Mativenga, Ampara Aramcharoen and Dehong Huo

3.1 Tool Size and Machining Scale 45

3.2 Manufacturing Methods for Solid Shank Micro Tools 46

3.3 Coatings and Coated Solid Shank Micro Tools 48

3.3.1 Closed Field Unbalanced Magnetron Sputter Ion Plating

(CFUBMSIP) 50

3.3.2 Coating Layout 50

3.4 Importance of Coated Micro Tools 52

3.5 Diamond Micro Cutting Tools 53

3.6 Micro Cutting Tool Wear 55

3.7 Smart Cutting Tools 58

References 59

4 Ultraprecision and Micro Machine Tools for Micro Cutting 63

Christian Brecher and Christian Wenzel

4.1 Introduction 63

4.2 Components of High Precision Machine Tools 64

4.2.1 Machine Base Materials 65

4.2.2 Drive Systems 66

4.2.3 Guidance Systems 69

4.2.4 Control Systems and Amplifiers 70

4.3 Diamond Turning Machines and Components 70

4.3.1 Typical Machine Setup 71

4.3.2 Market Comparison 73

4.3.3 Fast Tool Servo Technology 78

4.4 Precision Milling Machines 79

References 85

5 Engineering Materials for Micro Cutting 87

Sathyan Subbiah and Shreyes N. Melkote

5.1 Introduction 87

5.2 ‘Size’ Effects 88

5.3 Strain and Stress in Cutting 90

Contents vii

5.4 Elastic and Plastic Behaviours at the Micro-scale 94

5.5 Fracture 99

5.6 Metals, Brittle Materials and Others 105

5.6.1 Pure Materials 105

5.6.2 Ductile Metals 106

5.6.3 Brittle Materials – Glass, Silicon, Germanium, Tungsten

Carbide 107

5.6.4 Other Materials – Amorphous Alloys, Graphene and

Embedded Polymers 108

5.7 Summary 111

References 112

6 Modelling and Simulation of Micro Cutting 115

Ying-Chun Liang, Qing-Shun Bai and Jia-Xuan Chen

6.1 FE modelling and Analysis 116

6.1.1 Finite Element Model 116

6.1.2 Simulation on Micro-burr Formation 117

6.1.3 Influence of the Tool Edge Radius on Cutting Forces 118

6.1.4 Stress Distribution on the Micro-cutter 120

6.1.5 Micro-tool-tip Breakage 120

6.1.6 Thermal Analysis on Micro Cutting 123

6.2 Molecular Dynamics (MD) Modelling and Analysis 124

6.2.1 MD Modelling Process and Simulation 124

6.2.2 Modelling Analysis of Micro Cutting 127

6.2.3 Scratching Simulation by Using MD 128

6.2.4 Friction and Wear Simulation by Using MD 132

6.2.5 Effect of the Crystal Plane of Single Crystal and

Multicrystalline 135

6.2.6 Improvement of the MD Simulation Capability 137

6.3 Multiscale Modelling and Analysis 138

6.3.1 Advance in Multiscale Simulation Methods 140

6.3.2 Applications of Multiscale Simulation in Micro Cutting

Processes 143

6.3.3 Research Challenges and Future Trends 147

6.4 Summary 148

References 148

Part Two Applications 153

7 Diamond Turning and Micro Turning 155

Dehong Huo and Kai Cheng

7.1 Introduction 155

7.2 Ultra-precision Diamond Turning 155

7.2.1 A Historical Perspective of Diamond Turning 156

7.2.2 Material Perspectives 158

7.2.3 Micro Structuring by Diamond Turning 159

viii Contents

7.3 Micro Turning 166

7.3.1 Micro Turning Tool Fabrication 166

7.3.2 Micro Machines for Micro Turning 171

7.3.3 Size Effect Arising from Micro Turning 178

7.4 Challenges Arising from Micro Turning 182

References 182

8 Micro Milling: The State-of-the-art Approach Towards

Applications 185

Tao Wu and Kai Cheng

8.1 Introduction 185

8.2 Fundamental Elements in Micro Milling 186

8.2.1 Micro Milling Machines 187

8.2.2 Cutting Tools 189

8.2.3 Process Conditions 195

8.2.4 Work Materials 197

8.3 Micro Milling Mechanics 198

8.3.1 Size Effect in Micro-Scale Cutting 198

8.3.2 Minimum Chip Thickness 200

8.3.3 Work Micro Structure Effect 203

8.4 Modelling of the Micro Milling Process 205

8.4.1 Finite Element Modelling 206

8.4.2 Mechanistic Modelling 208

8.5 Metrology and Instrumentation 212

8.5.1 3D Surface Profilers 212

8.5.2 Microscopes 212

8.5.3 Process Monitoring Sensors and Systems 214

8.6 Scientific and Technological Challenges 217

8.6.1 Tool Run-out 217

8.6.2 Tool Wear and Life 218

8.6.3 Micro-Burr Formation 218

8.6.4 Process Conditions Optimization 219

8.7 Application Perspectives 220

8.8 Concluding Remarks 220

References 221

9 Micro Drilling Applications 227

M. J. Jackson, T. Novakov and K. Mosiman

9.1 Chapter Overview 227

9.2 Investigation of Chatter in Mesoscale Drilling 227

9.2.1 Torsional-axial Model 231

9.2.2 Bending Model 239

9.2.3 Combination of the Bending and Torsional-axial Models 242

9.2.4 Chatter Suppression 251

9.2.5 Research Challenges 256

9.3 Investigation of Chatter in Micro Drilling 257

Contents ix

9.4 Case Study: Micro Drilling Medical Polymer Materials and Composites 265

9.4.1 Tooling Selection 266

9.4.2 Cutting Mechanisms and Considerations 267

9.4.3 Drilling 268

9.4.4 Burr Elimination when Drilling Polymers 269

9.5 Conclusions 270

Acknowledgements 271

References 272

10 Micro Grinding Applications 275

Han Huang

10.1 Introduction 275

10.2 Principles and Methodologies 278

10.2.1 Removal Mechanism in the Grinding of Brittle Materials 278

10.2.2 Interaction Between a Work Material and Diamond Abrasives 280

10.2.3 Grinding Approaches for Micro Grinding 285

10.3 Implementation Perspectives 286

10.3.1 Truing and Dressing 286

10.3.2 Characterization of Wheel Topography and Cutting

Edge Distribution 287

10.3.3 Measurement of Grit Height Distribution 291

10.3.4 Characterization of Abrasive Wear 292

10.3.5 Compensation Grinding 292

10.3.6 Pragmatic Aspects in Profile Grinding 297

10.3.7 Parametric Effects in Profile Grinding 298

10.4 Application Cases 299

10.4.1 Micro Grinding of Aspherical Moulds 299

10.4.2 Micro Grinding of Optical Fibre Connectors 305

Acknowledgements 311

References 311

11 In-Process Micro/Nano Measurement for Micro Cutting 315

Wei Gao, Kang-Won Lee, Young-Jin Noh, Yoshikazu Arai and Yuki Shimizu

11.1 Introduction 315

11.2 The Hybrid Instrument for Micro Cutting and In-process Measurement 316

11.3 In-process Measurement of Micro Cutting Force 326

11.4 In-process Measurement of Micro Wear of Cutting Tool 331

11.5 In-process Measurement of Micro Surface Form 337

11.6 Summary 342

References 343

Index 345

Dr Yoshikazu Arai

Department of Nanomechanics

Tohoku University

Sendai, Japan

Dr Ampara Aramcharoen

Singapore Institute of Manufacturing

Technology (SIMTech), A*STAR

Singapore

Dr Qingshun Bai

School of Mechanical and Electrical

Engineering

Harbin Institute of Technology

Harbin, P R China

Professor Dr.-Ing Christian Brecher

Fraunhofer-Institut fuer

Produktionstechnologie IPT

Werkzeugmaschinenlabor WZL

der RWTH Aachen, Germany

Dr Jiaxuan Chen

School of Mechanical and Electrical

Engineering

Harbin Institute of Technology

Harbin, P R China

Professor Kai Cheng

School of Engineering and Design,

Brunel University

Uxbridge, Middlesex, UK

Professor Wei Gao

Department of Nanomechanics

Tohoku University

Sendai, Japan

Professor Han Huang

School of Mechanical & Mining

Engineering

The University of Queensland

Queensland, Australia

Dr Dehong Huo

School of Mechanical and Systems

Engineering,

Newcastle University

Newcastle Upon Tyne, UK

Professor Mark J. Jackson

Department of Mechanical Engineering

Technology

College of Technology

Purdue University

West Lafayette, USA

List of Contributors

xii List of Contributors

Kang-Won Lee

Department of Nanomechanics

Tohoku University

Sendai, Japan

Professor Yingchun Liang

School of Mechanical and Electrical

Engineering

Harbin Institute of Technology

Harbin, P R China

Dr Paul T. Mativenga

School of Mechanical, Aerospace and Civil

Engineering (MACE)

The University of Manchester

Manchester, UK

Professor Shreyes N. Melkote

George W. Woodruff School of Mechanical

Engineering

Georgia Institute of Technology

Atlanta, USA

K. Mosiman

Department of Mechanical

Engineering Technology

College of Technology

Purdue University

West Lafayette, USA

Dr Young-Jin Noh

Department of Nanomechanics

Tohoku University

Aramaki Aoba 6-6-01, Aoba-ku

Sendai, Japan

T. Novakov

Department of Mechanical Engineering

Technology

College of Technology

Purdue University

West Lafayette, USA

Dr Yuki Shimizu

Department of Nanomechanics

Tohoku University

Sendai, Japan

Dr Sathyan Subbiah

School of Mechanical and Aerospace

Engineering

Nanyang Technological University

Singapore

Dr Ing Christian Wenzel

Oberingenieur

Fraunhofer-Institut fuer

Produktionstechnologie IPT

Steinbachstrasse, Germany

Dr Tao Wu

School of Engineering and Design,

Brunel University

Uxbridge, Middlesex, UK

This book series provides a thorough summary of the methods used in micro- and

nano-technology research and shows how these advances are currently influencing many

scientific fields of study and practical application. This contextual presentation ensures that

the books are appropriate for readers with varied backgrounds, while being useful for self￾study or as classroom materials. Readers of these books will learn the fundamental principles

necessary to understand the topic and then explore examples that are representative of the

application of these fundamental principles.

Micro- and nano-scale materials created by novel fabrication techniques and metrology

methods are the basis for many modern technologies. Several books in this series pro￾vide a resource for building a thorough scientific understanding of the field. These include

Introduction to Microsystem Technology by Gerlach and Dotzel, Microfluidic Techno￾logy and Applications edited by Koch, Evans, and Brunnschweiler, Fluid Properties at

Nano/Meso Scale by Dyson, Ransing, P. Williams and R. Williams, and Nanoimprint

Technology: Nanotransfer for Thermoplastic and Photocurable Polymer edited by Jan

Taniguchi. Multiscale modeling, an important aspect of microsystem design, is exten￾sively reviewed in Multiscale Analysis of Deformation and Failure of Materials by

Jinghong Fan. Specific implementations and applications are presented in AC

Electrokinetics: Colloids and Nanoparticles by Morgan and Green, Digital Holography

for MEMS and Microsystem Metrology edited by Asundi. Topics of biological mechanics

are discussed in Nano and Cell Mechanics: Fundamentals and Frontiers edited by

Espinosa and Bao.

This book on micro-cutting, edited by Kai Cheng and Dehong Hou, presents technology

that has been developed over the last two decades to bridge the manufacturing size-scale

between precision and nanoscale manufacturing, i.e. feature sizes from a few millimeters to

tens of micrometers. Featured here are the micro-cutting tool fundamentals, principal

processes, and design-guiding modeling that have led to new applications for micro-cutting

manufacturing. New micro-cutting tools, often developed via miniaturization of conven￾tional machining tools, retain many of the advantages of conventional machining, not least

Series Preface