Khảo sát hình thái học và độ khám tế vi của lớp màng cứng crn chế tạo bằng phương pháp lắng đọng vật

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rr zo li -/ir

KHAO SAT HINH THAI HOC VAOQ NHAM TE VI CUA LdP MAN G

CUfNG CrN CHE TAO BANG PHI/0NG PHA P LANG DONG VAT LY

Tir PHA HOI TRONG MOI TRl/OFNG CHA N KHONG

INVESTIGATION INTO MORPHOLOGY AND MICRO/NANO-ROUGHNESS OF CrN HARD COATING

FABRICATED BY USING PHYSICALVAPOR DEPOSITION TECHNIQUE

Tran Van Dua, Pham Dvtc Cudng,

Oao Huy Hoang, Dao Duy Trung

Tom t^t

Mang culig goc Crom thucmg duoc su'dung bao ve be mat khoi sif cao xUdc va mai mon, giam ma sat chong

bam dinh, tang tuoi tho lam viec cua chi tiet va dung cu. Hinh ^ai hoc va do nham te vi ciJa 1 ^ mang CrN

dong mot vai tro quan trpng tdi dac tinh ma sat va mai mon ciia 1 ^ mang CrN. Bai bao gidi thieu tdm tat

ket qua nghien cdu tao Idp mang CrN bang phifOng phap lang dong vat ly ti^ pha hi^ trong moi tnfdng chan

khong tren mau thep 5KD11 va khao sat hinh thai hpc be mat va dp nham te vi cua Idp mang CrN tao du'oc.

Ket qui thu du'oc la cd sd de tiep tuc nghien cdu tao Idp mang CrN cd cac dac tinh phu hop dng dung trong

linhvilccflkhichetao.

Ti^ khda: M^ng cdng, PVD, ON, Hlnh thai hoc, Do nham te vi

Abstract

Tlie Cr-based hard coating is often used to protea the surface from scratching and abrasion, reduce

friction and surface adhesion, and therefore increase the lifetime of parts and tools. Morphology and

micro/nanoroughness of the CrN coating play an important role in determining the friction and wear

properties ofthe coating This paper briefly introduces the results of fabricating CrN coating on SKD11 steel

substrates using physical vapor deposition (PVD) technique and investigates rtie surface morphology and

micro/nanoroughness ofthe coating. The results are ftindamental for further study in order to fabricate

CrN coaling for industrial applications

Keywords: Hard coating, PVD, CrN, Morphology, Micro/nano roughness

TtiS.Tran Vanflua.TS.Ptiamflu'c Cudng, KS Dao Huy Hoang

Tnrting fiai hoc C6ng nghiep Ha Noi

TS. Dao Duy Trung - Viln Nghien cQu Co khi

Email; [email protected]

Ngaynhanbai: 10/03/2014

Ngay chap nhan dang: 16/05/2014

1.GldlTH|U

Mang eiJffig la mot hoac nhieu ldp

mong (ehieu day do bang nanomet

hoae mieromet) b^ng kim loai hoac

hap chat co goc kim loai (kim loai 6uge

nitrit hoa, cae bit hoa,...) dUdc phO len

be mat eua vat lieu nhSm mue dich bao

ve be mat khdi sJ cao xade, dong thdi

CO kha nang cSi thien cac dac tinh co￾ly-hoa khac.

Cae ldp mang ciJrng khong lam thay

doi cau true eixa vat lieu khoi cung nhii

hinh dang hinh hoe cua be mat dUOc

phd, nhung lai eo nhOng dae tinh cO￾ly-hoa tUdng tU nhU vat lieu khoi (bulk

materials) dung detao ra ehung. Vi the

Idp phii rat thich hop d l bao ve be mat

mem hon hoac cho cac be mat can cac

yeu cau ky thuat cu the ma khong can

phai che tao ca khoi vat lieu, cho hiSu

qua kinh te cao, dac biet la vdi eSc va!

lieu hiem va dat tien.

Ldp mang CrN co cac dac diem sau:

CO do cang eao (khoang 1800-210C

HV), he so ma sat nhd (khoang 0,5), kh3

nang chju nhiet tot (lam viee on dlnl'

tdi nhiet do 700°C), kha nang chju ma

mon va eao xUdc tot, CrN la vat lieu tre

(khong phan ufng vdi hau het eac ho;

chat) va on dmh, khS nang bam dinf

rat manh - tao ra lien ket phan tCf vci

vat lieu nen, co the diing de phu ler

rat nhieu loai vat lieu nen khae nfiau

Ben canh dd, CrN la vat lieu khong i36i

nen ed the phu cho cac dung cy diini

trong giai phau hoac cac thiet bj sai

xuat thu'c pham.

Hinh thai hpc va do nham be mSt I

mpt thdng sd quan trpng cua chi tie

Snh hu'dng tdi cac dac tinh lam viecVc

cac chi tiet/ be mat co khi cd ehuy^

ddng taong doi doi vdi cae chi tiet/b

TapchiKHOAHOC&CONGNGHE. So 22.201 4