Design and Implementation of VLSI Systems_Lecture 03: Cmos Fabrication potx

Design and Implementation of

VLSI Systems

Lecture 03

Thuan Nguyen

Faculty of Electronics and Telecommunications,

University of Science, VNU HCMUS

Spring 2011

1

LECTURE 03: CMOS FABRICATION

2

1 Fabricating One Inverter

2 Layout & Design Rule Check

3 Stick Diagram

4 Euler path

LECTURE 03: CMOS FABRICATION

3

1 Fabricating One Inverter

2 Layout & Design Rule Check

3 Stick Diagram

4 Euler path

4

REVIEW

n+

p

Source Gate Drain

bulk Si

SiO2

Polysilicon

n+

Body

SiO2

n

Source Gate Drain

bulk Si

Polysilicon

p+ p+

nMOS pMOS

WAFER PREPARATION

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CMOS FABRICATION

 CMOS transistors are fabricated on silicon wafer

 Lithography process similar to printing press

 On each step, different materials are deposited or

etched

 Easiest to understand by viewing both top and cross￾section of wafer in a simplified manufacturing

process

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EXAMPLE: INVERTER

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