Study On A Piezoelectric Actuated Micropump With Mixing Application

VIETNAM NATIONAL UNIVERSITY, HANOI

UNIVERSITY OF ENGINEERING AND TECHNOLOGY

NGUYEN NHU CUONG

STUDY ON A PIEZOELECTRIC-ACTUATED

MICROPUMP WITH MIXING APPLICATION

Field: Electronics and Telecommunications

Major: Electronic Engineering

Code: 8510302.01

MASTER THESIS IN

ELECTRONICS AND COMMUNICATIONS

Supervisor: Prof. Chu Duc Trinh

HANOI – 2021

VIETNAM NATIONAL UNIVERSITY, HANOI

UNIVERSITY OF ENGINEERING AND TECHNOLOGY

NGUYEN NHU CUONG

STUDY ON A PIEZOELECTRIC-ACTUATED

MICROPUMP WITH MIXING APPLICATION

Field: Electronics and Telecommunications

Major: Electronic Engineering

Code: 8510302.01

MASTER THESIS IN

ELECTRONICS AND COMMUNICATIONS

Supervisor: Prof. Chu Duc Trinh

HANOI - 2021

i

AUTHORSHIP

“I hereby declare that the work entitled “Study on a piezoelectric-actuated

micropump with mixing application” contained in this thesis is of my own and has not

been previously submitted for a degree or diploma at this or any other higher education

institution. To the best of my knowledge and belief, the thesis contains no materials

previously published or written by another person except where due reference or

acknowledgment is made.”

Date: November 8, 2021

Signature: ..........................................................

ii

APPROVAL OF SUPERVISOR

“I hereby approve that the thesis in its current form is ready for committee

examination as a requirement for the Master of Electronics at the VNU University of

Engineering and Technology.”

Signature: …………………………………………….

iii

ACKNOWLEDGEMENT

First of all, I would like to express my sincere gratitude to Prof. Dr. Chu Duc

Trinh for guiding me with his patience, enthusiasm, and profound knowledge. His

passion, encouragement, insightful comments have been helping me overcome the

difficulties that I have encountered during all the researching and thesis writing time.

I would like to show my appreciation to Micro-Electromechanical and

Microsystems Department (MEMS), and the VNU University of Engineering and

Technology where I worked on my thesis.

Last but not least, I would like to thank my family and my dear fellows for

encouraging and supporting me during my studies at the university.

November 8, 2021

1

TABLE OF CONTENTS

Authorship ....................................................................................................................... i

Approval of Supervisor .................................................................................................. ii

Acknowledgement......................................................................................................... iii

Table of Contents.............................................................................................................1

List of Figures..................................................................................................................3

List of Tables...................................................................................................................5

Abbreviation ....................................................................................................................6

Abstract............................................................................................................................7

Chapter 1. Introduction....................................................................................................8

1.1. Piezoelectricity .....................................................................................................8

1.2. Micropumps in Micro Total Analysis Systems..................................................13

1.3. Microvalves........................................................................................................15

1.4. Micromixers........................................................................................................19

1.5. Motivation for an Integrated Pumping and Mixing Device ...............................21

1.6. Proposed Work ...................................................................................................22

Chapter 2. Design and Simulation of a Piezoelectric-Actuated Micropump with Mixing

Application ....................................................................................................................23

2.1. Structure Design for Pumping and Mixing ........................................................23

2.2. Capacitive Sensing .............................................................................................26

2.3. Simulation Set-Up ..............................................................................................27

2.3.1. Pumping Simulation Set-Up........................................................................27

2.3.2. Mixing Simulation Set-Up ..........................................................................30

2.4. Simulation Results..............................................................................................32

2.4.1. Simulation Results on Pumping ..................................................................32

2.4.2. Simulation Results on Mixing.....................................................................36

Chapter 3. Experimental Results...................................................................................39

3.1. Experimental Set-Up ..........................................................................................39

3.2. Results and Discussion .......................................................................................40

3.2.1. Pumping Performance .................................................................................40

3.2.2. Mixing Performance....................................................................................44