Accuracy enhancement technologies for micromachining processes

Lecture Notes in Mechanical Engineering

Golam Kibria

B. Bhattacharyya   Editors

Accuracy

Enhancement

Technologies

for Micromachining

Processes

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Golam Kibria • B. Bhattacharyya

Editors

Accuracy Enhancement

Technologies

for Micromachining

Processes

123

Editors

Golam Kibria

Department of Mechanical Engineering

Aliah University

Kolkata, India

B. Bhattacharyya

Department of Production Engineering

Jadavpur University

Kolkata, India

ISSN 2195-4356 ISSN 2195-4364 (electronic)

Lecture Notes in Mechanical Engineering

ISBN 978-981-15-2116-4 ISBN 978-981-15-2117-1 (eBook)

https://doi.org/10.1007/978-981-15-2117-1

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Preface

Research challenges and developments in the direction of micromanufacturing of

macro- and micro-components for successful applications in the fields of biomed￾ical, microelectronics, optical, automotive, and aerospace are increasing day by day

due to the demand of fulfillment of such components with specific surface features,

dimensional accuracy, tolerance, and complex shapes. For this, a lot of research

activities in micromachining, as well as the development of micromachines, are

needed across the globe. Achieving desired surface finish, intricate profiles with

accuracy and tolerance, and geometrical dimensions is always a challenging task for

the manufacturing technocrats and research scientists. Since inception, a lot of

micromachining processes have been developed for achieving the mentioned

requirements for the products. However, due to the lack of complete understanding

of the physical phenomenon behind the processes, such degree of precision, geo￾metrical features, and surface characteristics have not been attained even today. The

development of materials with enormous material properties is also playing the

influencing factor of these deficiencies. A few research activities have been per￾formed by research scientists to implement novel strategies in micromachining for

augmenting these features related to quality, dimensional accuracy, and produc￾tivity. Some of the strategies have also been successfully employed in several

micromachining techniques.

The present book entitled Accuracy Enhancement Technologies for

Micromachining Processes attempts to collect research activities in different con￾ventional as well as non-conventional micromachining processes implementing

various novel machining strategies for improving the accuracy and features of

components. Chapter “Accuracy Improvement in Tool-Based Micromachining”

describes the methodologies of accuracy improvement in tool-based micromachin￾ing processes such as micro-turning, micro-drilling, and micro-milling for achieving

defect-free components and desired surface finish and accuracy. In chapter

“Strategies for Improving Performance of Ultrasonic Micromachining Process,” the

details of technologies of accuracy improvements in ultrasonic micromachining are

described with several developments in the process mechanism itself such as rotary

USM, workpiece vibration for the intention to achieve a high degree of accuracy and

v

surface profile. In chapter “Accuracy Improvement and Precision Measurement on

Micro-EDM,” the details of micro-electrical discharge machining with its perfor￾mance and operating parameters are described upon which the accuracy of

machining depends on. Further, this chapter also deals with discussions on several

factors that cause inaccuracies in micro-EDM. Chapter “Improvement of Profile

Accuracy in WEDM—A Novel Technique” deals with accuracy improvement

techniques in wire electrical discharge machining process for cutting different

complex profiles. Authors developed a new method of detection of wire lag phe￾nomenon and proposed mathematical models to compensate for the inaccuracy in

profile cutting. Chapter “Laser-based Fabrication of Micro-channels” deals with the

description of possibilities of inaccuracies during the generation of micro-channels

utilizing high-power laser beam. Authors have also discussed the underwater laser

micro-channeling process and techniques to improve the profile accuracy. Chapter

“Pulsed Nd:YAG Laser Cutting: Accuracy Improvement and Parametric Influences”

describes the possibilities of accuracy improvement during Nd:YAG laser cutting of

a variety of materials ranging from metals, non-metals, ceramics, composites, etc, for

establishing the reliability of Nd:YAG laser cutting process. Chapter “Improvement

in Surface Finish and Geometrical Accuracy by Laser Micro-turning” describes the

novel technique to improve the dimensional accuracy and surface finish during

micro-turning process utilizing pulsed Nd:YAG laser. Authors have carried out

detailed experimental investigation and analysis to improve surface features of laser

micro-turning components made of alumina ceramics. “Accuracy Improvement

Techniques in Electrochemical Micromachining (EMM)” describes the details of

accuracy improvement techniques for micromachining using electrochemical phe￾nomena. Authors have proposed several novel strategies to augment the geometrical

accuracy and surface features. Microtool insulation, IEG control, design, and

development of microtool have been proposed by the authors. In chapter “Surface

Micromachining—Advances and Advanced Characterization Techniques,” the

accuracy issues in various surface micromachining methods such as photolithog￾raphy, reactive ion etching, deep reactive ion etching, as well as some advanced

methods of micromachining such as focused ion beam fabrication, electron beam

lithography, are discussed. Chapter “Generation of Nano-level Surface Finish by

Advanced Nanofinishing Processes” presents details of several advanced nano￾finishing techniques such as abrasive flow finishing, magnetic abrasive finishing,

and magnetorheological abrasive flow finishing for the in-depth understanding of the

processes as well as for improving surface characteristics in nano-finishing

techniques.

Therefore, the present book offers a comprehensive overview of various

micromachining techniques and accuracy improvement techniques/strategies for

increasing the value addition of micro- and macro-products. This book will defi￾nitely draw innovative and valuable reference to engineers and R&D researchers

attached to micromachining processes. Moreover, the book can be used as a ref￾erence book for final-year undergraduate engineering courses and a course of

micromachining processes at the postgraduate level. Furthermore, this book can

vi Preface

serve as a useful reference for academics, researchers, mechanical, manufacturing,

industrial and materials engineers, professionals in micromachining processes, and

related industries.

The editors acknowledge Springer for providing this opportunity and for their

enthusiastic and professional support. Finally, the editors would like to thank all the

chapters’ contributors for their availability to complete this work.

Kolkata, India Golam Kibria

B. Bhattacharyya

Preface vii

Acknowledgements

This book has become a reality due to the constant inspirations and encourage￾ment received from the senior professors and colleagues such as Dr. B. Doloi,

Dr. D. Banerjee, Dr. S. Chakraborty, and Dr. B. R. Sarkar of Production

Engineering Department, Jadavpur University, Kolkata. The editors would like to

convey warm regards to Dr. V. U. Rathod, Dr. Mukandar Sekh, Dr. Shamim Haider

for constant support and active participation in preparing the manuscripts of this

book.

Financial support from the University Grants Commission (UGC), All India

Council for Technical Education (AICTE), Department of Science and Technology

(DST), and Council of Scientific and Industrial Research (CSIR) for carrying out

research in this area has proved to be useful for utilizing research outcomes to

enrich this book.

The editors acknowledge Springer for this opportunity and for their enthusiastic

and professional support. The team members of Springer like Anil Chandy,

Managing Director, Springer Nature Singapore Pte Ltd., William Achauer, Editorial

Director, Business, Economics, Political Sciences and Law—Books, Springer

Singapore, Divya Meiyazhagan (Ms.), Project Coordinator, Book Production of

Springer Nature, Aninda Bose (Mr.), Senior Editor—Hard Sciences Publishing

have put their constant effort in transforming this book into its final shape. Finally,

we would like to thank all the chapters’ contributors for their availability for this

work.

Kolkata, India

September 2019

Golam Kibria

B. Bhattacharyya

ix

Contents

Accuracy Improvement in Tool-Based Micromachining ............. 1

S. P. Leo Kumar

Strategies for Improving Performance of Ultrasonic Micromachining

Process .................................................. 23

B. Doloi, S. Kumar, S. Das and B. Bhattacharyya

Accuracy Improvement and Precision Measurement on Micro-EDM ... 47

Amit Kumar Singh, Siddhartha Kar and Promod Kumar Patowari

Improvement of Profile Accuracy in WEDM—A Novel Technique .... 79

Mukandar Sekh

Laser-based Fabrication of Micro-channels ...................... 95

Bappa Acherjee

Pulsed Nd:YAG Laser Cutting: Accuracy Improvement

and Parametric Influences ................................... 109

Girish Dutt Gautam and Dhananjay R. Mishra

Improvement in Surface Finish and Geometrical Accuracy by Laser

Micro-turning ............................................. 121

Golam Kibria, B. Doloi and B. Bhattacharyya

Accuracy Improvement Techniques in Electrochemical

Micromachining (EMM) ..................................... 149

V. Rathod, B. Doloi and B. Bhattacharyya

Surface Micromachining—Advances and Advanced Characterization

Techniques ............................................... 165

Arjyajyoti Goswami

Generation of Nano-Level Surface Finish by Advanced

Nano-Finishing Processes .................................... 199

A. Barman and M. Das

xi

Editors and Contributors

About the Editors

Dr. Golam Kibria is an Assistant Professor in Department of Mechanical

Engineering in Aliah University, Kolkata, India. He graduated in Mechanical

Engineering from Kalyani Government Engineering College, West Bengal, India.

He completed his M.Tech in Production Engineering from Jadavpur University,

Kolkata in 2008. He completed Ph.D. Degree from Jadavpur University, Kolkata in

2014. He has worked as Senior Research Fellow (SRF) in Council of Scientific &

Industrial Research (CSIR) sponsored Extra Mural Research (EMR) scheme from

2008 to 2011. After one year service in Sikkim Manipal University, Sikkim,

India, he joined Aliah University, Kolkata. His research interests include non￾conventional machining processes, micromachining and advanced manufacturing

and forming technology. He is a life member of The Institution of Engineers (IEI),

India. He has several International and National Journal research papers and

research papers in reputed national and international conferences proceedings. He

has also published several books chapters in different research oriented books

(Springer, Elsevier, Nova etc). He has attended various repute Workshops,

International and National Conferences and Seminars at various cities of India. He

is editorial board member as well as reviewer of a number of reputed international

journals.

Dr. B. Bhattacharyya is fellow of Indian National Academy of Engineering

(INAE) and Professor and Ex-Head of the Production Engineering Department and

Ex-Coordinator of Center of Advance Study (CAS) Programme under University

Grants Commission and Quality Improvement Programme under AICTE of

Jadavpur University. His research areas include non-traditional machining, micro

machining, advanced manufacturing systems, etc. He has published 140 research

papers in National and International Journals and 271 research papers in National

and International Conferences. He has published several book chapters and con￾ference proceedings. Recently, he has published one book titled “Electrochemical

xiii

Micromachining for Nanofabrication, MEMS and Nanotechnology”, William

Andrew Applied Science Publishers, Micro & Nano Technologies Series, Elsevier

Inc, USA. Recently, he published a book “Modern Machining Technology”,

published from Academic Press. Several PhD theses have been completed under his

guidance. He has completed several research projects. He is recipient of various

awards, e.g. Gold Medal and Certificate of Achievements for research papers and

thesis as well as the Career Award of the UGC, New Delhi.

Contributors

Bappa Acherjee Production Engineering Department, Birla Institute of

Technology: Mesra, Ranchi, India

A. Barman Department of Mechanical Engineering, IIT Guwahati, Guwahati,

Assam, India

B. Bhattacharyya Production Engineering Department, Jadavpur University,

Kolkata, India

M. Das Department of Mechanical Engineering, IIT Guwahati, Guwahati, Assam,

India

S. Das Mechanical Engineering Department, Swami Vivekananda Institute of

Science & Technology, Kolkata, India

B. Doloi Production Engineering Department, Jadavpur University, Kolkata, India

Girish Dutt Gautam Department of Mechanical Engineering, Jaypee University

of Engineering and Technology, Guna, Madhya Pradesh, India

Arjyajyoti Goswami Department of Mechanical Engineering, National Institute

of Technology Durgapur, Durgapur, West Bengal, India

Siddhartha Kar Department of Mechanical Engineering, National Institute of

Technology Silchar, Silchar, Assam, India

Golam Kibria Mechanical Engineering Department, Aliah University, Kolkata,

India

S. Kumar Production Engineering Department, Jadavpur University, Kolkata,

India

S. P. Leo Kumar Department of Production Engineering, PSG College of

Technology, Coimbatore, India

Dhananjay R. Mishra Department of Mechanical Engineering, Jaypee University

of Engineering and Technology, Guna, Madhya Pradesh, India

Promod Kumar Patowari Department of Mechanical Engineering, National

Institute of Technology Silchar, Silchar, Assam, India

xiv Editors and Contributors

V. Rathod Mechanical Engineering Department, Government Polytechnic

Mumbai, Mumbai, Maharashtra, India

Mukandar Sekh Department of Mechanical Engineering, Aliah University,

Kolkata, India

Amit Kumar Singh Department of Mechanical Engineering, National Institute of

Technology Nagaland, Dimapur, Nagaland, India

Editors and Contributors xv

Accuracy Improvement in Tool-Based

Micromachining

S. P. Leo Kumar

Abstract The need for micro part is growing drastically because of technology

advancement in biomedical, semiconductor, and aerospace industries, etc. Tool￾based micromachining is the advanced approach for the production of parts for

enhanced functionality with significant size reduction. Part accuracy is dealt with

the degree at which the part approximates the true geometrical shape and size.

In this chapter, factors that influence the part geometrical and dimensional accu￾racy in tool-based micromachining are presented. It is divided into six major ele￾ments: (a) cutting tool, (b) work material, (c) environment, (d) cutting phenomenon,

(e) process parameters, and (f) machine tool. In this study, tool-oriented conventional

micromachining processes are considered. The individual sub factors are represented

by a fishbone diagram. The influence of parameters and their cause are described

with the published literature, and the possible ways for part accuracy improvement

in tool-based micromachining are presented.

Keywords Micro drilling · Micro turning · Micro milling · Part accuracy

1 Introduction

The need for microscale (1–500 µm) and meso (500 µm–10 mm) parts with desired

functionality is rapidly increasing in various fields include automobile, aerospace,

optical, biomedical industries, etc. The products are available in assortment of materi￾als. Micro manufacturing is the advanced approach for recognition of micro product.

Earlier time, watch parts are considered as micro part. Current changes because

of technology expansion necessitate micro product for various applications such as

medical, biomedical equipments, surgery tool, etc. [1].

S. P. Leo Kumar (B)

Department of Production Engineering, PSG College of Technology,

Coimbatore 641004, India

e-mail: [email protected]

© Springer Nature Singapore Pte Ltd. 2020

G. Kibria and B. Bhattacharyya (eds.), Accuracy Enhancement Technologies

for Micromachining Processes, Lecture Notes in Mechanical Engineering,

https://doi.org/10.1007/978-981-15-2117-1_1

1

2 S. P. Leo Kumar

Any part consists of two or more micro features can be termed as micro part

according to the definition of micro/meso mechanical manufacturing (4M) associa￾tion. It clearly defines that the term micro deals with feature but not part size. There are

two kinds of micro manufacturing: lithography and non-lithography techniques. Pho￾tolithography approach assists micro manufacturing, but has certain disadvantages in

developing elevated aspect ratio (AR) structures, more capital investment, and work

material limitation [2]. Later approach overcomes the drawback with lithography

techniques for the past two decades. It is grouped into mechanical and advanced

micromachining, finishing, and forming processes [3]. Achieving the required accu￾racy and surface finish is the prime requirements in micromachining. Accordingly, it

is classified as precision and ultra-precision machining. In precision machining, the

accuracy level is of up to 10 µm and surface finish up to 10 nm. In ultra-precision

machining, the achievable accuracy is in the order of 1 µm and surface finish value

is of <10 nm [4].

Mechanical micromachining deals with machining using micro tools, and it pos￾sesses key features over lithography approach such as handling complex product,

processing range of materials, cost, and geometrical accuracy. It is grouped into

conventional, advanced, and nano finishing techniques [5]. Conventional process

includes micro turning, drilling, and milling. Advanced processes are grouped into

mechanical, thermal, and chemical energy-related operation [6].

1.1 Accuracy Improvement

Accuracy of a part or machine is dealt with the degree with which it approximates

the geometrical shape and size. In general, it is impossible to manufacture a part or

machine tool in accordance with geometrical representation. Hence, deviation from

the ideal or theoretical values is taken as the measure of accuracy. These deviations

will be compared against the permitted value for the actual function of the part or

machine [7]. Accordingly, tolerances will be established for all the quality features

of a typical micro part or machine tool.

A typical part accuracy consists of various elements include (a) geometrical accu￾racy, (b) dimensional accuracy, (c) positional accuracy of surfaces, and (d) surface

texture. All the elements have significant influence of functionality of micro part or

machine tool. The necessity for miniature and micro parts is growing nature, accuracy

improvement toward the theoretical or ideal requirements are inevitable in nature.

There are three major area that needs development in the field of micro fabrication: (a)

process characteristics study, (b) micromachining tool development, and (c) online

metrology. Accuracy improvement in micromachining covers broad spectrum and

having huge research scope for the development in the field of micromachining.

In this chapter, some fundamental aspects of tool-based micromachining process

are introduced. Geometrical and dimensional part accuracy produced by tool-based

micromachining greatly affected by workpiece, cutting tool, cutting phenomenon,

machining parameters, and plant and machine tool parameters. Effects of major